Initial Statement of Beneficial Ownership (3)

FORM 3	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES	OMB APPROVAL OMB Number: 3235-0104 Estimated average burden hours per response... 0.5
	Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940

1. Name and Address of Reporting Person * Vedula Srinivas	2. Date of Event Requiring Statement (MM/DD/YYYY) 8/30/2021	3. Issuer Name and Ticker or Trading Symbol ONTO INNOVATION INC. [ONTO]
(Last)        (First)        (Middle) C/O ONTO INNOVATION INC., 16 JONSPIN ROAD	4. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director                          _____ 10% Owner _____ Officer (give title below)        ___X___ Other (specify below) / Sr VP, Customer Success Group
(Street) WILMINGTON, MA 01887       (City)              (State)              (Zip)	5. If Amendment, Date Original Filed(MM/DD/YYYY)	6. Individual or Joint/Group Filing(Check Applicable Line) _X_ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security (Instr. 4)	2. Amount of Securities Beneficially Owned (Instr. 4)	3. Ownership Form: Direct (D) or Indirect (I) (Instr. 5)	4. Nature of Indirect Beneficial Ownership (Instr. 5)
Common Stock	20416 (1)	D

Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivate Security (Instr. 4)	2. Date Exercisable and Expiration Date (MM/DD/YYYY)		3. Title and Amount of Securities Underlying Derivative Security (Instr. 4)		4. Conversion or Exercise Price of Derivative Security	5. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 5)	6. Nature of Indirect Beneficial Ownership (Instr. 5)
	Date Exercisable	Expiration Date	Title	Amount or Number of Shares

Explanation of Responses:
(1)	Includes shares issuable pursuant to 10,457 restricted stock units and 3,734 shares held in the Issuer's Employee Stock Purchase Plan. Each restricted stock unit represents a contingent right to receive one share of ONTO common stock.

Reporting Owners
Reporting Owner Name / Address	Relationships
	Director	10% Owner	Officer	Other
Vedula Srinivas C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON, MA 01887				Sr VP, Customer Success Group

Signatures
By: /s/ Robert A. Koch For: Srinivas Vedula		9/1/2021
**Signature of Reporting Person		Date