Axcelis Wins Follow-On Multi System, Multi Fab Order For 'Purion H' From Asia Pacific Chipmaker

BEVERLY, Mass., April 1, 2015 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received follow-on Purion H™ orders from one of the world's leading manufacturers of DRAM devices in the Asia Pacific region. The order will result in multiple fabs, each receiving multiple Purion H high current tools in Q2. The systems will be used to support a continued capacity expansion for next generation memory devices. 

"This win is indicative of the advantages the Purion H provides for next generation planar and 3D device manufacturing, especially for materials modification implants," said John Aldeborgh, executive vice president, customer operations.  "The Purion's innovative scanned spot beam is the only technology available today specifically designed to support these new applications by taking precision process control to the next level to enhance device yield, while providing the industry's highest level of productivity.  These emerging applications provide significant growth opportunities for Axcelis, especially in the high current segment."

The Power of Purion
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.   On this platform, Axcelis has built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.

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