EUV Photoresist Pioneer Inpria Raises $31 Million in Series C Funding Led by JSR Corporation
20 February 2020 - 12:00PM
Business Wire
Expanded Investor Group Reflects Growing
Industry Support
Inpria, a pioneer in high-resolution metal oxide photoresists
for extreme ultraviolet lithography (EUV), today announced that it
has secured $31 million in Series C funding from a broad syndicate
representing leaders from across the semiconductor manufacturing
ecosystem. This financing was led by photoresist manufacturer and
existing investor, JSR Corporation. New investors included SK hynix
Inc. and TSMC Partners. The round also included participation from
existing investors Air Liquide Venture Capital ALIAD, Applied
Ventures, Intel Capital and Samsung Venture Investment
Corporation.
“Inpria is the world leader in metal oxide photoresists for
advanced EUV lithography process,” said Mark Slezak, President of
JSR Micro and new Inpria Board Director. “We are excited to expand
our partnership with Inpria as we collaborate with them on quality
and overall market acceptance.”
Comprised of tin-oxide nanoclusters, Inpria photoresists deliver
higher resolution with building blocks a fraction the size of
traditional polymer-based resists which are tuned to optimally
absorb EUV photons. With unparalleled etch selectivity, Inpria
photoresists enable simpler manufacturing flows and larger process
windows for an overall reduction in cost of ownership. Inpria
recently brought online its high-volume manufacturing plant to
support the initial production ramp for customers.
“We believe our investor participation serves as an indicator
for Inpria’s strategic significance to the semiconductor industry.
We are delighted that our investor base now includes all
semiconductor manufacturers worldwide that are currently adopting
EUV patterning. This achievement is complemented by the strong
participation of photoresist, equipment and industrial chemical
manufacturer investors as well,” added Andrew Grenville, CEO of
Inpria. “We look forward to working with our global partners to
deliver a breakthrough EUV photoresist platform to the
industry.”
About Inpria
Inpria Corporation is the world leader in metal oxide
photoresist design, development and manufacturing. Inpria’s EUV
photoresists enable semiconductor manufacturers to realize the full
potential of EUV lithography. Learn more at www.inpria.com.
About JSR Corporation
JSR Corporation is a multinational company employing more than
9,000 people worldwide and a leading materials supplier in a
variety of technology driven markets. JSR’s global network is
headquartered in Tokyo (Japan) and has factories and offices in
Europe, USA, China, Taiwan, Korea, Singapore and Thailand. JSR is a
research-oriented organization that pursues close collaborations
with leading innovators in a number of industries that are a key to
the present and future welfare of human society: life-sciences,
energy storage, synthetic rubbers, electronic materials, display
and edge computing related items. For more information about JSR
Corporation, please go to www.jsr.co.jp.
About SK hynix Inc. www.skhynix.com
About ALIAD
www.airliquide.com/connected-innovation/aliad-venture-capital
About Applied Ventures www.appliedventures.com or follow
@Applied_VC
About Intel Capital www.intelcapital.com or follow
@Intelcapital
About Samsung Venture Investment Corporation
www.samsungventure.co.kr
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version on businesswire.com: https://www.businesswire.com/news/home/20200220005292/en/
Ann Carney Nelson 541-844-2812 media-relations@inpria.com