Mykrolis's IntelliFlow(R) 3XP Qualified by Semiconductor Equipment Supplier

Mykrolis's IntelliFlow(R) 3XP Qualified by Semiconductor
Equipment Supplier
Pressure-Insensitive MFC Is Process-Qualified for Next-Generation Etch Tools



BILLERICA, Mass., May 16  /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE:MYK), a leading supplier of components and subsystems to the
semiconductor industry, today announced that a major semiconductor equipment
supplier based in the United States has selected the IntelliFlow 3XP mass flow
controller (MFC) as a standard option for its etch tools. IntelliFlow 3XP is
Mykrolis's 3rd generation of IntelliFlow Digital MFCs and uniquely integrates
several Mykrolis gas delivery core technologies into a single, modular solution
for advanced semiconductor processing.

According to Stuart Tison, VP and General Manager of Mykrolis's Gas Delivery
business, "IntelliFlow 3XP offers the latest, most advanced technology
available for gas flow control.  IntelliFlow 3XP has successfully demonstrated
superior performance in the field for advanced wafer processing and is
receiving favorable reviews from OEMs and IC manufacturers around the world.
IntelliFlow 3XP truly delivers on Mykrolis's commitment to innovative,
leading-edge technology that enables our customers' most advanced processes."

IntelliFlow 3XP provides superior performance over previous MFC technology for
key attributes such as accuracy, response time, control range, pressure
insensitivity, and programmability to enable superior yield on next generation
etch, deposition and thermal processes. IntelliFlow 3XP also offers a unique,
modular solution by providing options for integrated pressure transducers,
displays, and UHP contamination control which can lower gas system cost and
size while simultaneously improving quality, reducing maintenance, and
increasing tool uptime. IntelliFlow 3XP will continue to incorporate industry
leading IntelliFlow software for user configurable gases and ranges,
diagnostics, and graphical user interfaces.

About Mykrolis

Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide
developer, manufacturer and supplier of liquid and gas delivery systems,
components and consumables used to precisely measure, deliver, control and
purify the process liquids, gases and chemicals, as well as the deionized
water, photoresists and vacuum systems utilized in the semiconductor
manufacturing process. In addition, the Company's products are used to
manufacture a range of other products, such as flat panel displays, high purity
chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic
cables.  For more information, visit http://www.mykrolis.com/.

IntelliFlow and Mykrolis are registered trademarks of Mykrolis. Mykrolis logo
is a trademark of Mykrolis Corporation.

   CONTACT:
   Craig Lazinsky
   Mykrolis Corporation
   Tel. [phone]
   

DATASOURCE: Mykrolis Corporation



CONTACT:  Craig Lazinsky of Mykrolis Corporation, [phone],





Web site:  http://www.mykrolis.com/

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