Mykrolis (NYSE:MYK)
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Mykrolis Introduces XacTorr(R) CMC Series Vacuum Gauges
XacTorr CMC Delivers High Performance Vacuum Measurement in a Compact Design
Less Than Half the Size of Traditional Gauges
BILLERICA, Mass., July 11 /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE:MYK), a leading supplier of components and subsystems to the
semiconductor industry, today announced the release of the XacTorr CMC series
of compact capacitance diaphragm gauges (CDGs) for vacuum processes that
provide accurate total pressure measurement independent of gas composition.
The XacTorr CMC series incorporates a unique combination of technologies that
include a thermally balanced mechanical structure, physical strain isolation
and sensor shielding for optimal short-term repeatability and long- term
stability. In addition, the XacTorr CMC offers accuracy to 0.25% of reading for
more demanding applications.
According to Shaun Pewsey, senior product manager at Mykrolis Corp., "The
XacTorr CMC Series is a high performance, cost effective solution for unheated
gauge applications. Its compact layout, unique design and high accuracy make
the XacTorr CMC an ideal alternative to larger, premium unheated gauges and
facilitates easy installation and retrofit replacement."
The XacTorr CMC Series is available in full-scale ranges from 10 Torr to 1000
Torr and is a perfect upgrade for smaller form-factor CDGs and an economical
alternative to full sized unheated CDGs.
About Mykrolis
Mykrolis is a worldwide developer, manufacturer and supplier of liquid and gas
delivery systems, components and consumables used to precisely measure,
deliver, control and purify the process liquids, gases and chemicals, as well
as the deionized water, photoresists and vacuum systems utilized in the
semiconductor manufacturing process. In addition, the Company's products are
used to manufacture a range of other products, such as flat panel displays,
high purity chemicals, photoresists, solar cells, gas lasers, optical disks and
fiber optic cables. Based in Billerica, Massachusetts, Mykrolis is formerly
Millipore Microelectronics, Inc. For more information, visit
http://www.mykrolis.com/.
Mykrolis and XacTorr are registered trademarks of Mykrolis Corporation.
PRESS CONTACT:
Craig Lazinsky
Mykrolis Corporation
Tel. 978-436-6500
DATASOURCE: Mykrolis Corporation
CONTACT: Craig Lazinsky of Mykrolis Corporation, +1-978-436-6500,
Web site: http://www.mykrolis.com/