Mykrolis (NYSE:MYK)
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Mykrolis Introduces New Planarcore(TM) PVA Brushes for Enhanced
Post-CMP Wafer Cleaning and Polishing
Innovative integrally molded design of polyvinyl acetal (PVA) brushes ensures
consistency and process stability
BILLERICA, Mass., June 30 /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE:MYK), a leading supplier of components and subsystems to the
semiconductor industry, today announced the release of its new Planarcore(TM)
polyvinyl acetal (PVA) brushes. Due to their unique, patent-pending "integrally
molded" design, Mykrolis Planarcore PVA brushes provide greater consistency and
improved performance in post-CMP cleaning and polishing applications.
Unlike traditional PVA products that are friction-fitted to a core, Mykrolis
Planarcore PVA brushes feature PVA anchored to an integral brush core. This
innovative design provides dimensional stability and core flow equalization and
ensures that concentricity is not lost during use. As a result of these
benefits and the high purity of PVA, particle counts on wafers are
significantly reduced.
"With our new Planarcore PVA brushes, Mykrolis offers the most advanced
technology for wafer cleaning and polishing," said Christopher Wargo, director
of the CMP business at Mykrolis. "Our proprietary design achieves absolute
consistency from brush to brush, giving our customers greater control and
reliability. The integral core design also facilitates rapid installation,
another key consideration since tool uptime in a fab is critical to
productivity and throughput. We already have several key customers using the
Planarcore product, and the results so far have been very positive. We expect
much wider usage with the official product launch."
Mykrolis's new Planarcore PVA brushes will be on display at SEMICON West, booth
#726, in San Francisco from July 12 to 14, 2004.
About Mykrolis
Mykrolis is a worldwide developer, manufacturer and supplier of liquid and gas
delivery systems, components and consumables used to precisely measure,
deliver, control and purify the process liquids, gases and chemicals, as well
as the deionized water, photoresists and vacuum systems utilized in the
semiconductor manufacturing process. In addition, the Company's products are
used to manufacture a range of other products, such as flat panel displays,
high purity chemicals, photoresists, solar cells, gas lasers, optical disks and
fiber optic cables. Based in Billerica, Massachusetts, Mykrolis is formerly
Millipore Microelectronics, Inc. The Company acquired certain assets of
Aeronex Corporation in October 2003. For more information, visit
http://www.mykrolis.com/.
Mykrolis is a registered trademark of Mykrolis Corporation. Planarcore is a
trademark of Mykrolis Corp.
CONTACT:
Craig Lazinsky
Mykrolis Corporation
Tel. 978-436-6500
DATASOURCE: Mykrolis Corporation
CONTACT: Craig Lazinsky of Mykrolis Corporation, +1-978-436-6500,
Web site: http://www.mykrolis.com/