Mykrolis Introduces New High Flow Diffuser for Flat Panel and 300 mm Tools

Mykrolis Introduces New High Flow Diffuser for Flat Panel and 300
mm Tools
Specifically Designed for High Volume Throughput & Easily Customized 


BILLERICA, Mass., July 12  /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE:MYK), a leading supplier of components and subsystems to the
semiconductor industry, will introduce the latest addition to the
Chambergard(TM) Diffuser product line, the BGN High-Flow Diffuser, at SEMICON
West (Booth# 726) from July 12-14, 2004.  This new diffuser is specifically
designed for use in high-flow applications such as load locks used for Flat
Panel Display (FPD) and 300 mm tools.

The Chambergard BGN Diffuser utilizes Mykrolis's patented nickel filter element
to quickly disperse the flow of incoming gas, allowing the load lock chamber to
fill at a higher rate without particle disturbance or excessive turbulence. 
The BGN removes submicron particle contamination from incoming gas and rapidly
vents to the atmosphere, thereby decreasing cycle time.  Its advanced
technology allows FPD and 300 mm tool customers to retrofit the diffuser to
work with their existing tool or have it built to order.

"Until now, delivering large volumes of gas quickly to FPD and 300 mm tools was
a challenge," says Robert Zeller, gas filtration product manager at Mykrolis,
"Chambergard BGN is purposely designed to meet the needs of these customers.
The large size gives them greater efficiency and decreases chamber vent time
needed to meet their process objectives."

About Mykrolis

Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide
developer, manufacturer and supplier of liquid and gas delivery systems,
components and consumables used to precisely measure, deliver, control and
purify the process liquids, gases and chemicals, as well as the deionized
water, photoresists and vacuum systems utilized in the semiconductor
manufacturing process. In addition, the Company's products are used to
manufacture a range of other products, such as flat panel displays, high purity
chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic
cables. Mykrolis acquired the assets of Aeronex Corporation in October 2003.
Mykrolis is formerly Millipore Microelectronics, Inc. For more information,
visit http://www.mykrolis.com/.

Mykrolis is a registered trademark of Mykrolis. Chambergard and the Mykrolis
logo are trademarks of Mykrolis Corporation.

  CONTACT:
   Craig Lazinsky
   Mykrolis Corporation
   Tel. [phone]
   

DATASOURCE: Mykrolis Corporation



CONTACT: Craig Lazinsky of Mykrolis Corporation, [phone],





Web site:  http://www.mykrolis.com/

Copyright