Mykrolis Introduces IntelliFlow(R) 3XP Digital Mass Flow Controller at SEMICON West

Mykrolis Introduces IntelliFlow(R) 3XP Digital Mass Flow
Controller at SEMICON West
3rd Generation of IntelliFlow Digital Mass Flow Controller Delivers X-treme
Performance Through Unique Integration of Mykrolis Gas Delivery Core
Technologies 


SAN FRANCISCO, SEMICON West, July 7  /PRNewswire-FirstCall/ -- Mykrolis
Corporation (NYSE:MYK), a leading supplier of components and subsystems to the
semiconductor industry, will introduce its new IntelliFlow(R) 3XP Digital Mass
Flow Controller (MFC) at SEMICON West (Booth #726) in San Francisco from July
12-14, 2004. IntelliFlow 3XP is Mykrolis's 3rd generation of IntelliFlow
Digital MFCs and uniquely integrates several Mykrolis gas delivery core
technologies into a single, modular solution for advanced semiconductor
processing.

IntelliFlow 3XP delivers extreme performance for key attributes such as
accuracy, response time, control range, pressure insensitivity, and
programmability to enable superior yield on next generation etch, deposition
and thermal processes. IntelliFlow 3XP also offers a unique, modular solution
by providing options for integrated pressure transducers, displays, and UHP
contamination control which can lower gas system cost and size while
simultaneously improving quality, simplifying maintenance, and increasing tool
uptime. IntelliFlow 3XP will continue to incorporate industry leading
IntelliFlow software for user configurable gases and ranges, diagnostics, and
graphical user interfaces.

According to Bill Culwell, product manager at Mykrolis Corp., "IntelliFlow 3XP
offers the latest in state of the art technology available for gas flow
control. Its unique combination of extreme performance, integrated technology,
and superior user configurable and diagnostic software provides customers the
ultimate capability for improving IC processing, tool uptime, and cost of
ownership.

About Mykrolis

Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide
developer, manufacturer and supplier of liquid and gas delivery systems,
components and consumables used to precisely measure, deliver, control and
purify the process liquids, gases and chemicals, as well as the deionized
water, photoresists and vacuum systems utilized in the semiconductor
manufacturing process. In addition, the Company's products are used to
manufacture a range of other products, such as flat panel displays, high purity
chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic
cables. Mykrolis acquired the assets of Aeronex Corporation in October 2003.
Mykrolis is formerly Millipore Microelectronics, Inc.  For more information,
visit http://www.mykrolis.com/.

IntelliFlow and Mykrolis are registered trademarks of Mykrolis Corporation.

  Press Contact:
   Craig B. Lazinsky
   Mykrolis Corporation
   Tel. [phone]
   

DATASOURCE: Mykrolis Corporation



CONTACT:  Craig B. Lazinsky, Mykrolis Corporation, +01 978-436-6743,

 



Web site:  http://www.mykrolis.com/

Copyright