Mykrolis (NYSE:MYK)
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Altis Semiconductor Selects Mykrolis Fluorogard RS(R) Product
Line for Photoresist Stripping and Polymer Removal Applications
High-Capacity Filtration Technology Extends Filter Lifetime, Maximizing Total
Filtration Volume and System Uptime
Billerica, Mass., June 28 /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE:MYK), a leading supplier of components and subsystems to the
semiconductor industry, today announced that Altis Semiconductor, a wafer fab
company which manufactures devices down to 0.13(mu)m and specializes in
manufacturing state of the art electronic components, has qualified
Fluorogard(R) RS product line for photochemical stripping. Altis will be using
Mykrolis's Fluorogard RS filters at their facility in France, one of the
largest semiconductor device manufacturing plants in Europe.
During a photochemical stripping process evaluation of the Mykrolis Fluorogard
RS product line, the performance of the Fluorogard RS-M, in particular,
exceeded expectations. The Fluorogard RS-M filter achieved a filter time of two
months -- four times longer that of the previous filter, and significantly
reduced tool downtime caused by bath contamination.
"We are pleased that Altis Semiconductor has recognized and will benefit from
the improved filtration technology of our Fluorogard RS product line," said
Randy Broomhall-Dillard, product manager at Mykrolis.
Mykrolis's Fluorogard RS filters provide ultimate protection from films, gels,
and hard-particle contaminants encountered in photoresist-stripping and polymer
removal applications used in the semiconductor manufacturing process. Designed
to last two to three times longer than existing filters, Fluorogard RS filters
offer a lower cost of ownership. The filters are available in a variety of
retention ratings (0.05, 0.1 and 0.2 (mu)m) and in the following
configurations:
* Fluorogard P-RS (Pre-Resist Stripping) -- PTFE pre-filter used in
conjunction with the Fluorogard RS-T in non-ashing photoresist
stripping
* Fluorogard RS-M (Resist Stripping Multi-membrane) -- compact PTFE pre-
filter/membrane filter combination for non-ashing photoresist
stripping
* Fluorogard RS-T (Resist Stripping Thick) -- PTFE membrane filter
optimized for photoresist stripping and residue removal after ashing
About Altis Semiconductor
Altis Semiconductor is a French 8" wafer fab, which manufactures devices down
to 0.13(mu)m. Altis is a joint venture between Infineon Technologies and IBM
Microelectronics. Altis Semiconductor was created in July 1999 as a 50/50
joint-venture between two major players in the international semiconductor
industry, Infineon Technologies and IBM Microelectronics Division. Combining
the strengths of two world wide semiconductor companies, as well as drawing
from their complementary cultures, creates a highly dynamic and creative
company, specialized in the manufacturing of state of the art electronic
components. For more information visit http://www.altissemiconductor.com/.
About Mykrolis
Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide
developer, manufacturer and supplier of liquid and gas delivery systems,
components and consumables used to precisely measure, deliver, control and
purify the process liquids, gases and chemicals, as well as the deionized
water, photoresists and vacuum systems utilized in the semiconductor
manufacturing process. In addition, the Company's products are used to
manufacture a range of other products, such as flat panel displays, high purity
chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic
cables. Mykrolis is formerly Millipore Microelectronics, Inc. For more
information, visit http://www.mykrolis.com/.
Fluorogard and Mykrolis are registered trademarks of Mykrolis Corporation.
PRESS CONTACT:
Craig B. Lazinsky
Mykrolis Corporation
Tel. +01 978-436-6743
DATASOURCE: Mykrolis Corporation
CONTACT: Craig B. Lazinsky of Mykrolis Corporation, +1-978-436-6743,
Web site: http://www.mykrolis.com/