Trikon's Omega fxP for Silicon Trench Etching Nominated by European Semiconductor Magazine for Best Wafer Processing Tool

Trikon's Omega fxP for Silicon Trench Etching Nominated by
European Semiconductor Magazine for Best Wafer Processing Tool 


NEWPORT, Wales, June 15  /PRNewswire-FirstCall/ -- Trikon Technologies, Inc.
(NASDAQ:TRKN), a leading provider of wafer fabrication equipment and services
to the global semiconductor industry, announced today that its Omega fxP for
silicon trench etching has been short listed for best tool in the Eurosemi IC
Industry Wafer Processing category.  Trikon's Omega fxP is equipped with
in-situ interferometric end-point detection (IEPD) allowing semiconductor
producers to achieve better yields at lower costs.

"Leading power device makers that have recently switched to using Omega ICP
etchers in production are benefiting from our industry-leading depth control,"
commented president and CEO of Trikon Technologies, Dr. John Macneil. "In turn,
this leads to higher device yields and lower overall costs through reduced
scrap. A major reason for these improvements is the use of IEPD."

Dr. Macneil explained, "In a power MOSFET device the depth control of the
front-end silicon trench is critical to the performance of the final device.
IEPD continuously records the progress of the etch front and automatically
terminates the process at a pre-programmed depth."

The Eurosemi IC Industry Awards will be announced during SEMICON West, a major
industry trade show to be held July 12-14 of this year.  The voting period is
still open, and individuals may submit their votes at
http://www.eurosemi.eu.com/. The awards are given to highlight innovation and
best practice in the IC industry where technical achievement is expected and
every decision and idea is a potential breakthrough. The awards focus on the
people, processes and products that drive the industry forward. They are aimed
to recognize the vital individuals and companies that enable a company to
achieve success in a competitive global market.

About Trikon Technologies

Trikon Technologies is a leading provider of wafer fabrication equipment and
services to the global semiconductor industry.  Trikon develops and
manufactures advanced capital equipment for plasma etching and chemical and
physical vapor deposition (CVD and PVD) of thin films for use in the production
of semiconductor, MEMS and similar devices.  These are key components in most
advanced electronic products, such as telecommunication devices, consumer and
industrial electronics and computers.  More information is available at: 
http://www.trikon.com/. 

DATASOURCE: Trikon Technologies, Inc.



CONTACT:  Katrina Bomont, Marketing Publicity Manager of Trikon

Technologies, Inc., [phone], or ; or Stew

Chalmers of Positio, [phone], or , or investors, Kevin

Kirkeby of The Global Consulting Group, [phone], or

, both for Trikon Technologies, Inc.



Web site:  http://www.trikon.com/ 

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