Statement of Changes in Beneficial Ownership (4)

FORM 4 [ ] Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES	OMB APPROVAL OMB Number: 3235-0287 Estimated average burden hours per response... 0.5
	Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940

1. Name and Address of Reporting Person * Mahon Steven Scott	2. Issuer Name and Ticker or Trading Symbol CASCADE MICROTECH INC [ CSCD ]	5. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director                      _____ 10% Owner __ X __ Officer (give title below)      _____ Other (specify below) Vice President, Operations
(Last)          (First)          (Middle) CASCADE MICROTECH INC., 2430 NW 206TH AVENUE	3. Date of Earliest Transaction (MM/DD/YYYY) 11/7/2014
(Street) BEAVERTON, OR 97006 (City)        (State)        (Zip)	4. If Amendment, Date Original Filed (MM/DD/YYYY)	6. Individual or Joint/Group Filing (Check Applicable Line) _ X _ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security (Instr. 3)	2. Trans. Date	2A. Deemed Execution Date, if any	3. Trans. Code (Instr. 8)		4. Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
			Code	V	Amount	(A) or (D)	Price
Common Stock	11/7/2014		M		7500	A	$0.00   (1)	35035   (2)	D
Common Stock	11/7/2014		F (3)		2727	D (3)	$12.4600	32308	D
Common Stock	11/7/2014		M		1725	A	$0.00   (1)	34033	D
Common Stock	11/7/2014		F (3)		628	D (3)	$12.4600	33405	D

Table II - Derivative Securities Beneficially Owned ( e.g. , puts, calls, warrants, options, convertible securities)
1. Title of Derivate Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Trans. Date	3A. Deemed Execution Date, if any	4. Trans. Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
				Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares
Restricted Stock Units	$0.00   (1)	11/7/2014		M			7500	11/7/2014   (4)	(5)	Common Stock	7500	$0.0   (1)	0	D
Restricted Stock Units	$0.00   (1)	11/7/2014		M			1725	11/7/2014   (4)	(5)	Common Stock	1725	$0.00   (1)	3450	D

Explanation of Responses:
( 1)	These Restricted Stock Units do not carry a conversion price.
( 2)	Holdings include 1,196 shares of common stock acquired on April 30, 2014 and 1,159 shares of common stock acquired on October 31, 2014 pursuant to the Company's 2013 Employee Stock Purchase Plan
( 3)	Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units.
( 4)	Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Restricted Stock Units cliff vest annually on the anniversary date of the award in four annual installments.
( 5)	Restricted Stock Units have no expiration date.

Reporting Owners
Reporting Owner Name / Address	Relationships
	Director	10% Owner	Officer	Other
Mahon Steven Scott CASCADE MICROTECH INC. 2430 NW 206TH AVENUE BEAVERTON, OR 97006			Vice President, Operations

Signatures
Amy Swinhoe by Power of Attorney		11/12/2014
** Signature of Reporting Person		Date

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
*	If the form is filed by more than one reporting person, see Instruction 4(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note:	File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
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