ATMI and Matheson Tri-Gas Deliver SDS(R)3 for Enhanced Safety and Productivity

ATMI and Matheson Tri-Gas Deliver SDS(R)3 for Enhanced Safety and
Productivity
3rd Generation SDS Delivers Up to Three Times More Gas 


DANBURY, Conn., May 10  /PRNewswire-FirstCall/ -- ATMI, Inc. (NASDAQ:ATMI) and
Matheson Tri-Gas, suppliers of materials and materials packaging and delivery
systems to the world's leading semiconductor manufacturers, today announced the
3rd generation Safe Delivery Source -- the semiconductor industry's only
sub-atmospheric storage and delivery system -- called "SDS(R)3." Using ATMI's
new monolithic carbon adsorbent, the SDS3 is able to store and deliver 2 to 3
times as much ion implant dopant gas as the 2nd generation SDS2 -- or the
equivalent of 10 to 20 dilute high-pressure gas cylinders -- in the same
footprint.

"The launch of SDS3 is a direct response to our customers' needs for higher gas
deliverables and reduced costs, without compromising the safety of their
implant operations," said Jim Dietz, ATMI's Director of Implant Marketing. "Our
patented High-Density Monolithic Carbon (HD-MC(TM)) adsorbent creates
manufacturing efficiencies for us, which translates into a lower cost per gram
for our customers."

"With ATMI's HD-MC(TM) adsorbent, we've once again improved both gas handling
safety and productivity," said Volker Heilmann, Vice-President for
Sub-atmospheric Gas Products at Matheson Tri- Gas. "All SDS3 cylinders are now
specially leak tested with a patented chamber test procedure to 1x10-8 atm --
cc/sec. This is approximately 1000 times lower than typical industry standards.
Since we joined forces with ATMI more than ten years ago, Matheson Tri-Gas and
ATMI have shipped over 75,000 SDS cylinders without any significant gas release
incidents. We believe that no other product offers a better total cost of
ownership for our customers. In conjunction with the intrinsic safety this
product provides, SDS's value proposition is now even more compelling."

The SDS3 is initially available in JY-size cylinders, for arsine, phosphine,
and enriched boron trifluoride gas species.

About ATMI's HD-MC(TM) Adsorbent Technology

SDS3 incorporates High-Density Monolithic Carbon; a new form of carbon
adsorbent developed at ATMI. HD-MC is engineered to reduce internal cylinder
void space by 50% over the SDS2, while also accepting higher loadings of
implant gases. The gas molecules latch onto the surface of the adsorbent
thereby reducing the gas pressure to sub-atmospheric levels, which virtually
eliminates the possibility of a significant gas release. And, since there is no
longer the hazard of a high-pressure gas release, more process gas can be
stored in the cylinder.

About Matheson Tri-Gas

Matheson Tri-Gas, Inc. is a single source provider of industrial and specialty
gases, including bulk and cylinder gases, gas handling equipment, high
performance purification systems, and related hardgoods. As a member of the
Taiyo Nippon Sanso Corporation group, Matheson Tri-Gas, Inc. is part of a
worldwide industrial gas organization focusing on being the single source
provider for global customer requirements. Please visit
http://www.matheson-trigas.com/

ATMI provides specialty materials and materials packaging to the worldwide
semiconductor industry. As the Source of Semiconductor Process Efficiency, ATMI
helps customers improve wafer yields and lower operating costs. For more
information, please visit atmi.com

Statements contained herein that relate to ATMI's future performance,
including, without limitation, statements with respect to ATMI's anticipated
results of operations or level of business for 2005 or any other future period,
are forward-looking statements within the safe harbor provisions of the Private
Securities Litigation Reform Act of 1995. Such statements are based on current
expectations only and are subject to certain risks, uncertainties, and
assumptions, including, but not limited to, changes in semiconductor industry
growth (including, without limitation, wafer starts) or ATMI's markets;
competition, problems, or delays developing and commercializing new products;
problems or delays in integrating acquired operations and businesses; and other
factors described in ATMI's filings with the Securities and Exchange
Commission. Such risks and uncertainties may cause actual results to differ
materially from those expressed in our forward- looking statements. ATMI
undertakes no obligation to update any forward- looking statements. 

DATASOURCE: ATMI, Inc.



CONTACT:  Dean Hamilton of ATMI Investor & Public Relations, direct,

[phone], or [phone], ext. 4202, or 



Web site:  http://www.matheson-trigas.com/ 

Web site:  http://www.atmi.com/ 

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