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Advanced Energy Unveils Aera(R) PI-980(TM) Pressure-Insensitive
MFC With NeuralStep(TM) Control Technology
Next-Generation Pressure-Insensitive MFC for Etch, CVD, PVD and Diffusion
Processes Enables Exceptionally Fast Response and Higher Yields
FORT COLLINS, Colo., July 5 /PRNewswire-FirstCall/ -- Advanced Energy
Industries, Inc. (NASDAQ:AEISE) today unveiled its next-generation Aera(R)
PI-980(TM) series of pressure-insensitive mass flow controllers (MFCs) for
advanced semiconductor applications. Designed to improve processes for etch,
CVD, PVD and diffusion, the PI-980 MFC's innovative technology provides greater
gas-flow stability, higher accuracy, exceptionally fast response and superior
real-time process control. Its highly stable flow delivers greater process
control and repeatability, maximizing production yields.
(Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO)
The PI-980 series complements the recently released Aera Transformer(TM)
780/7800 series of digital MFCs, allowing fabs and OEMs to standardize on the
latest technologies from Aera across multiple process steps and varied
application requirements.
By combining exceptionally fast NeuralStep(TM) control technology with an
integrated pressure transducer, the PI-980 MFC dramatically increases the speed
of the MFC response. This increased speed virtually eliminates the effects of
upstream and downstream pressure disturbances. Faster response delivered with
excellent flow stability enable shorter process steps, stable chamber-gas
delivery, higher accuracy, higher repeatability and a wide, multi-gas control
range. The result is optimized process performance and maximized yields.
Further, the PI-980 MFC enhances overall system cost of ownership by
eliminating the need for a number of traditional, costly gas-panel components.
Its multi-gas, multi-range functionality dramatically reduces inventory
requirements.
Steve Rhoades, executive vice president, Products and Operations, noted, "Our
new PI-980 MFCs with NeuralStep technology are a best-in-class addition to
Aera's world renowned line of MFCs. This is a great example of AE's continuing
commitment to technology innovation. It's also a great example of AE's
continuing commitment to increasing our customers' competitive advantage."
About Advanced Energy
Advanced Energy is a global leader in the development and support of
technologies critical to high-technology manufacturing processes used in the
production of semiconductors, flat panel displays, data storage products,
compact discs, digital video discs, architectural glass and other advanced
product applications.
Leveraging a diverse product portfolio and technology leadership, AE creates
solutions that maximize process impact, improve productivity and lower cost of
ownership for its customers. This portfolio includes a comprehensive line of
technology solutions in power, flow management, thermal instrumentation and
plasma and ion beam sources for original equipment manufacturers (OEMs) and
end-users around the world.
AE operates in regional centers in North America, Asia and Europe and offers
global sales and support through direct offices, representatives and
distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq
National Market under the symbol AEIS. More information can be found at
http://www.advanced-energy.com/
Advanced Energy, AE, Aera and PI-980 are trademarks of Advanced Energy
Industries.
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
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DATASOURCE: Advanced Energy Industries, Inc.
CONTACT: Marna Shillman, Corporate Communication Manager of Advanced
Energy Industries, Inc., +1-970-407-6280, ; or Angie
Kellen, Sr. Account Manager of MCA, +1-650-968-8900, , for
Advanced Energy Industries, Inc.
Web site: http://www.advanced-energy.com/