New ADE FabVision Data Management System Purchased by Leading Japanese Silicon Wafer Supplier; Fab-Wide Data Analysis, Storage a

ADE Corporation (Nasdaq: ADEX) today announced the sale
of its new FabVision(TM) system, to a leading Japanese semiconductor
wafer supplier. The system is installed in one of the company's
leading-edge production facilities. FabVision is a real-time,
comprehensive, fab-wide data management system that continuously
monitors, reports and manages product quality information. Integration
of FabVision has shortened the customer's cycle times and increased
process yields. Alerts on process excursions, daily reports and
selected data are generated and sent automatically worldwide to better
manage operations at the fab, process or customer level.
   "The purchase and acceptance of FabVision has allowed our customer
to combine data from multiple tool types for an enhanced view of each
process step," stated ADE President and CEO Dr. Chris L. Koliopoulos.
"With the ease of data access and the automatic alerts on all
out-of-spec conditions, they have been able to quickly analyze and
resolve process problems, resulting in improved cost of ownership and
higher yields. FabVision is a unique system that leverages the ADE
tool base for further benefit and advantage to our customers who adopt
this process yield management system."
   The FabVision system includes a fully integrated master server,
tool interconnections, workstations and software that enables the user
to easily collect, analyze, store and retrieve critical metrology and
inspection data from a wide range of measurement and inspection tools
distributed throughout the production process without interruption or
throughput reduction. With FabVision, wafer manufacturers and wafer
reclaim operations have the ability to retain the metrology and
inspection data for millions of wafers and to retrieve critical
information about those wafers in seconds. The integrated database
enables a quick analysis and response to customers' inquiries about
product history and quality. With real-time production information,
the FabVision system provides management, engineering and operations
with the capability to proactively detect process excursions that can
lead to yield loss.
   The FabVision server collects and combines data from ADE's just
introduced WaferXam(TM) defect detection and classification tool and
industry standard WaferSight(TM) optical flatness system, AFS(TM)
Advanced Flatness System, AWIS(TM) Advanced Wafer Inspection System,
FIT(TM) Film Inspection Tool, NanoMapper(R) surface topography system,
AcuMap(TM) film thickness mapper, WaferCheck(R), UltraGage(R) and
UltraScan(R) dimensional sorting systems and CR8X particle inspection
products. Tying together the data from these tools improves process
yields and increases tool utilization, which lowers the total cost of
manufacturing. As wafer makers and reclaim houses increase capacity
and add tools, FabVision reduces the complexity of reviewing thousands
of wafers a day for product yield management.
   ADE is demonstrating the FabVision data management system, as well
as its full line of silicon wafer production and semiconductor process
control systems, at Semicon West, July 12 -14, Moscone Center, South
Hall, Booth 1302, in San Francisco. For more information, contact ADE
at [e-mail]

   About ADE Corporation

   ADE Corporation is a leading supplier of metrology and inspection
systems required for production in the silicon wafer, semiconductor
device, magnetic data storage and optics manufacturing industries. The
Company's systems analyze and report product quality at critical
manufacturing process steps for yield enhancement, providing quality
certification data that is relied upon by semiconductor wafer, device
and computer disk manufacturers. The Company's systems also are used
for production measurements in the semiconductor chip fabrication
process. To learn more about ADE, visit the Company's Web site at
http://www.ade.com.