ADE WaferSight System Targets 35nm Processes at Leading Wafer Polishing Manufacturer Peter Wolters; High-Precision Wafer Mapping

ADE Corporation (Nasdaq: ADEX) today announced that the
leading expert in wafer polishing, Peter Wolters AG, has purchased and
installed a WaferSight(TM) advanced wafer geometry system at its R&D
laboratory in Germany. WaferSight provides high resolution mapping of
wafer shape, flatness, thickness and edge roll-off variations based on
ADE's proprietary optical laser interferometry. The sub-nanometer site
flatness measurement precision offers better control of the polishing
process, and supports the ITRS roadmap requirements at and beyond the
35nm technology node.
   "The high precision surface mapping capabilities of the
WaferSight, with integrated edge roll-off analysis, have allowed us to
extend the results of our advanced polishing systems," stated Peter
Wolters R&D Director Dr. Georg Moersch. "WaferSight helps us to have a
better eye on tool performance for double-sided polishing, our AC
line, and is even more important for the haze-free polishing feature
of our newly developed HFP300 system. Within a short period of time,
we have been able to identify and correct several process-specific
signatures thereby further improving polished wafer quality.
WaferSight is a valuable tool as we develop our equipment and
processes for the 35nm technology node in order to maintain our
leading position in this highly competitive market."
   ADE's WaferSight offers low cost of ownership dimensional
metrology for wafer suppliers, incoming quality control and
semiconductor equipment manufacturers' R&D applications. In addition
to industry standard wafer thickness, flatness, bow and warp
measurements, the WaferSight system simultaneously measures and
reports wafer edge roll-off (ERO), a critical component of lithography
yield and CMP uniformity and process control. Production-proven
WaferSight systems are available for both 300mm and advanced 200mm
applications with non-contaminating edge-grip wafer handling.

   About Peter Wolters AG

   Peter Wolters AG, the dominant worldwide supplier of double side
and haze free silicon wafer polishing equipment, is a wholly owned
subsidiary of Novellus. To learn more about Peter Wolters, visit the
company's web site at http://www.peter-wolters.com.

   About ADE Corporation

   ADE Corporation is a leading supplier of metrology and inspection
systems required for production in the silicon wafer, semiconductor
device, magnetic data storage and optics manufacturing industries. The
Company's systems analyze and report product quality at critical
manufacturing process steps for yield enhancement, providing quality
certification data that is relied upon by semiconductor wafer, device
and computer disk manufacturers. The Company's systems also are used
for production measurements in the semiconductor chip fabrication
process. To learn more about ADE, visit the Company's Web site at
http://www.ade.com.