Ade (NASDAQ:ADEX)
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From Jun 2019 to Jun 2024
ADE Corporation (Nasdaq: ADEX) today announced the
WaferXam(TM), ADE's latest-generation nano-particle inspection and
defect classification tool. This advanced darkfield laser scanning
system is used for inspection of prime silicon substrates at
semiconductor incoming quality control and silicon wafer suppliers,
where advanced design rules require more real-time measurement and
inspection for cost-effective process control. The WaferXam tool
features a new system design, utilizing enhancements to ADE's patented
Angle Resolved Scatter architecture, for highly improved defect
detection sensitivity and classification performance.
Positioned to serve the 45nm process development market and exceed
the requirements for 65nm wafer production, the flexible WaferXam
platform offers a high-sensitivity mode with 33nm defect detection to
meet tightening customer specifications, with production throughputs
in excess of fifty 300mm wafers per hour. New classification
algorithms, combined with increased defect sensitivity, result in more
yield-killing defects detected and binned in real time for higher
yields and faster process feedback.
"Device yield starts with the bare silicon wafer," stated Paul
Hofemann, ADE's vice president of marketing and business development.
"At the 65nm node and below, minute substrate flaws, once considered
trivial, have become defects that impact device yield. These new
defects must be captured with enough signal discrimination to be
sorted real-time into useful classification bins that expedite root
cause corrective action. ADE's proven, superior defect inspection
technology is providing the critical data for fab managers and
engineers to better manage their incoming silicon to optimize their
device yield performance."
"Effective process control requires high confidence, real-time
defect classification," added Hofemann. "ADE's WaferXam system uses a
unique darkfield angular resolved scatter technology that leverages
the advanced optics architecture for superior defect detection and
classification, without costly and time-consuming manual review. The
process engineer working on advanced 45nm R&D or 65nm production now
has the ability to detect and classify in real-time the new nanoscale
yield-limiting defects, while avoiding benign defect distractions."
ADE's WaferXam system, for 300mm and advanced 200mm wafer
production, features non-contaminating edge grip handling and full
factory automation wafer production. WaferXam tools integrate
seamlessly with ADE's new FabVision(TM) fab-wide data management and
yield improvement system.
ADE will be highlighting the performance benefits of the new
WaferXam and FabVision systems, as well as its full line of
semiconductor wafer inspection, metrology tools and yield management
systems, at Semicon West, July 12-14, Moscone Center, South Hall,
Booth 1302, in San Francisco.
About ADE Corporation
ADE Corporation is a leading supplier of production process
control and quality certification systems for the semiconductor
device, silicon wafer, magnetic data storage, and optics manufacturing
industries. The Company's systems measure and inspect a variety of
bare silicon and patterned wafers for dimensional parameters, surface
defects, particles, and process non-uniformities, analyzing and
reporting product quality at critical manufacturing process steps for
yield enhancement. To learn more about ADE, visit the Company's
Website at http://www.ade.com.