Ade (NASDAQ:ADEX)
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From Jun 2019 to Jun 2024
ADE Corporation (Nasdaq: ADEX) today announced the
receipt of a purchase order for its new NanoXam(TM) patterned wafer
metrology system from a leading analog and DSP semiconductor
manufacturer. As a result of a successful on-site evaluation program,
the NanoXam system was selected by one of the company's 300mm
production facilities to control dishing and erosion in leading edge
CMP processes and to develop processes for 45nm node advanced
products.
"As part of our growth strategy to extend ADE's advanced surface
topography technology into the semiconductor device fab, we have been
working with a leading semiconductor manufacturer to test NanoXam in a
world class fabrication environment," stated Dr. Chris L. Koliopoulos,
president and chief executive officer of ADE Corporation. "This
opportunity for copper and tungsten applications development has
allowed ADE to gain leading edge CMP yield experience and to tailor
our NanoXam patterned wafer tool as a cost effective, in-line process
control solution. We are extremely pleased with NanoXam's performance
in the field and with the interest level that we are seeing for this
leading-edge product. Customer adoption of this new tool has opened
new and larger market opportunities for ADE."
The NanoXam design uses optical non-contact interferometry to
measure the surface topography of product wafers, providing rapid
feedback of copper and tungsten planarization processes while
monitoring dishing and erosion. NanoXam's capability for large area
3-D views provides a consistent metric for the selecting and
optimizing of expensive consumables in the CMP process. In ECD copper
plating, NanoXam measurements provide an innovative solution for
characterizing copper layer uniformity and visualizing loading
effects.
"The NanoXam system provides true 3-D wafer surface topography
measurements, enabling customers to quickly optimize and monitor
leading edge processes, including tungsten and copper CMP and copper
ECD, by allowing non-contact measurements in active areas of product
die or on scribe line monitors," continued Dr. Koliopoulos.
The NanoXam system, designed for 200mm or 300mm patterned product
wafers, provides stable step-height analysis and 3-D surface
topography maps with full pattern recognition. The NanoXam's user
friendly recipe structure allows multiple die sampling to identify
process non-uniformities within-wafer, wafer-to-wafer and lot-to-lot.
With fast data acquisition through its non-contact design, NanoXam
provides users with a higher value statement and lower cost of
ownership when compared to traditional stylus contact profilometry or
AFM tools.
About ADE Corporation
ADE Corporation is a leading supplier of metrology and inspection
systems required for production in the silicon wafer, semiconductor
device, magnetic data storage and optics manufacturing industries. The
Company's systems analyze and report product quality at critical
manufacturing process steps for yield enhancement, providing quality
certification data that is relied upon by semiconductor wafer, device
and computer disk manufacturers. The Company's systems also are used
for production measurements in the semiconductor chip fabrication
process. To learn more about ADE, visit the Company's Web site at
www.ade.com.